MEMS AND BIOMEMS

For more details about this research see the webpage of INESC MN or contact Prof. João Pedro Conde (joao.conde[AT]ist.utl.pt).

Thin Film MEMS and NEMS

  • Properties of amorphous and nanocrystalline thin-film silicon for MEMS applications
  • Thin-film silicon MEMS/NEMS flexural and bulk resonators
  • Thin-film silicon MEMS/NEMS oscillators and CMOS integration
  • Performance of resonators in dissipative media (air and water)
  • Integration of thin-film silicon MEMS with microfluidics for biosensing
  • Large area MEMS for sensing and actuation


Representative Publications:
  • P.M. Sousa, V. Chu, J.P. Conde, “Reliability and stability of thin-film amorphous silicon MEMS resonators”, J. Micromech. Microeng. 22, 065030 (2012). |www| (selected for inclusion in IOP Select, selected for the J. Micromech. Microeng. 2011-2012 Highlights)
  • J. Gaspar, A. Gualdino, B. Lemke, O. Paul, V. Chu, and J. P. Conde, “Mechanical and Piezoresistive Properties of Thin Silicon Films Deposited by PECVD and HWCVD at Low Substrate Temperatures”, J. Appl. Phys. 112, 024906 (2012). |www|
  • A. Gualdino, V. Chu, J.P. Conde, “Study of the out-of-plane vibrational modes in thin-film amorphous silicon micromechanical disk resonators”, J. Appl. Phys. 113, 174904 (2013). |www|
  • J. Mouro, A. Gualdino, V. Chu, J.P. Conde, “Microstructure factor and mechanical and electronic properties of hydrogenated amorphous and nanocrystalline silicon thin-films for MEMS applications”, J. Appl. Phys. 114, 184905 (2013). |www|
  • J. Mouro, A. Gualdino, V. Chu, J.P. Conde, “Tunable Properties of Hydrogenated Amorphous/ Nanocrystalline Silicon Thin-Films for Enhanced MEMS Resonators Performance”, IEEE J. Microelectromech. Syst. 23, 600-609 (2014). |www|


BIOMEMS and Lab-on-Chip Systems

  • Microfluidic lab-on-chip platform for biosensing
    1. Integrated optical, electrical, and microelectromechanical transduction
    2. External and integrated capillary pumping
    3. Integrated sample preparation, extraction and concentration
    4. Systems for point-of-care/point-of-use multiplex analysis
  • Cell-chips for biomedical research


Representative Publications:
  • S.S. Donato, V. Chu, D.M.F. Prazeres, J.P. Conde, “Metabolic viability of E.coli trapped by dielectrophoresis in microfluidics”, Electrophoresis 34, 575-582 (2013). |www|
  • S.A. Martins, G. Moulas, J.R. Trabuco, G.A. Monteiro, V. Chu, J.P. Conde, D.M. Prazeres, “Monitoring intracellular calcium in response to GPCR activation using thin-film silicon photodiodes with integrated fluorescence filters”, Biosensors and Bioelectronics 52, 232-238 (2014). |www|
  • D.C. Martins, V. Chu, J.P. Conde, “Transient Streaming Current Measurements in Nanochannels for Molecular Detection”, Appl. Phys. Lett. 103, 253112 (2013). |www|
  • P. Novo, V. Chu, J.P. Conde, “Integrated optical detection of autonomous capillary microfuidic immunoassays: a hand-held point-of-care prototype”, Biosensors and Bioelectronics 57, 284-291 (2014). |www|
  • P. Novo, V. Chu, J.P. Conde, “Integrated fluorescence detection of labeled biomolecules using a prism-like PDMS microfluidic chip and lateral light excitation”, Lab Chip 14, 1991-1995 (2014). |www|
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